JPH0455556B2 - - Google Patents

Info

Publication number
JPH0455556B2
JPH0455556B2 JP61303527A JP30352786A JPH0455556B2 JP H0455556 B2 JPH0455556 B2 JP H0455556B2 JP 61303527 A JP61303527 A JP 61303527A JP 30352786 A JP30352786 A JP 30352786A JP H0455556 B2 JPH0455556 B2 JP H0455556B2
Authority
JP
Japan
Prior art keywords
layer
insulating layer
circuit board
opening
multilayer wiring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61303527A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63155691A (ja
Inventor
Tatsuya Sakano
Kenji Sasaoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP30352786A priority Critical patent/JPS63155691A/ja
Publication of JPS63155691A publication Critical patent/JPS63155691A/ja
Publication of JPH0455556B2 publication Critical patent/JPH0455556B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Production Of Multi-Layered Print Wiring Board (AREA)
JP30352786A 1986-12-18 1986-12-18 多層配線回路基板 Granted JPS63155691A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP30352786A JPS63155691A (ja) 1986-12-18 1986-12-18 多層配線回路基板

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP30352786A JPS63155691A (ja) 1986-12-18 1986-12-18 多層配線回路基板

Publications (2)

Publication Number Publication Date
JPS63155691A JPS63155691A (ja) 1988-06-28
JPH0455556B2 true JPH0455556B2 (en]) 1992-09-03

Family

ID=17922060

Family Applications (1)

Application Number Title Priority Date Filing Date
JP30352786A Granted JPS63155691A (ja) 1986-12-18 1986-12-18 多層配線回路基板

Country Status (1)

Country Link
JP (1) JPS63155691A (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0746755B2 (ja) * 1990-11-15 1995-05-17 インターナシヨナル・ビジネス・マシーンズ・コーポレーシヨン 多層薄膜構造の製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6196796A (ja) * 1984-10-17 1986-05-15 株式会社日立製作所 多層配線板

Also Published As

Publication number Publication date
JPS63155691A (ja) 1988-06-28

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term